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Applied Physics Letters / Volume 97 / Issue 5 / LASERS, OPTICS, AND OPTOELECTRONICS

Appl. Phys. Lett. 97, 051108 (2010); http://dx.doi.org/10.1063/1.3476342 (3 pages)

Low dark current long-wave infrared InAs/GaSb superlattice detectors

Jean Nguyen, Alexander Soibel, David Z.-Y. Ting, Cory J. Hill, Mike C. Lee, and Sarath D. Gunapala

Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109, USA

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(Received 28 May 2010; accepted 16 July 2010; published online 5 August 2010)

Surface leakage reduction has been achieved using BCl3/Cl2/CH4/H2/Ar inductively coupled plasma dry etching for pixel isolation of high performance long-wave infrared superlattice detectors. The leakage has been minimized by effectively increasing the surface resistivity by more than 7.4 times and decreasing the surface state density by more than 3.8 times. Through altering the etch mechanism, the dark current density was reduced by more than two orders of magnitude where a dark current of 1.01×10−5 A/cm2 at 200 mV was achieved at T = 77 K for a 10.3 μm detector with a peak quantum efficiency value of 30% (without antireflection coating).

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

etching, gallium compounds, III-V semiconductors, indium compounds, infrared detectors, superlattices, surface states

PACS

  • 85.60.Gz

    Photodetectors (including infrared and CCD detectors)

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3476342

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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    D. Z. Ting, C. J. Hill, A. Soibel, S. A. Keo, J. M. Mumolo, J. Nguyen, and S. D. Gunapala, Appl. Phys. Lett. 95, 023508 (2009)APPLAB000095000002023508000001.

    M. Herrera, M. Chi, M. Bonds, N. D. Browning, J. N. Woolman, R. E. Kvaas, S. F. Harris, D. R. Rhiger, and C. J. Hill, Appl. Phys. Lett. 93, 093106 (2008)APPLAB000093000009093106000001.

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