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Applied Physics Letters / Volume 97 / Issue 7 / NANOSCALE SCIENCE AND DESIGN

Appl. Phys. Lett. 97, 073112 (2010); http://dx.doi.org/10.1063/1.3480411 (3 pages)

High Q optomechanical resonators in silicon nitride nanophotonic circuits

K. Y. Fong, W. H. P. Pernice, Mo Li, and H. X. Tang

Departments of Electrical Engineering, Yale University, New Haven, Connecticut 06511, USA

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(Received 2 May 2010; accepted 27 July 2010; published online 18 August 2010)

We demonstrate integrated photonic circuits made from stoichiometric silicon nitride for effective integration of high Q micromechanical resonators and nano-optical components. Using silicon bulk micromachining techniques we fabricate free-standing highly tensile nanostrings exceeding 400 μm in length. The nanostrings are actuated using gradient optical force and their mechanical motion is readout with a sensitive interferometric scheme. A mechanical Q of 340 000 is obtained in vacuum. This fully integrated optomechanical circuit presents a promising scheme for on-chip high Q mechanical sensing applications.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

integrated optics, micromachining, nanophotonics, optical resonators, silicon compounds

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3480411

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    H. J. Mamin and D. Rugar, Appl. Phys. Lett. 79, 3358 (2001)APPLAB000079000020003358000001.

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