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Applied Physics Letters / Volume 97 / Issue 8 / LASERS, OPTICS, AND OPTOELECTRONICS

Appl. Phys. Lett. 97, 081108 (2010); http://dx.doi.org/10.1063/1.3483766 (3 pages)

Ultrathin silicon nitride microring resonator for biophotonic applications at 970 nm wavelength

Ilya Goykhman, Boris Desiatov, and Uriel Levy

Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, Israel

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(Received 4 June 2010; accepted 8 August 2010; published online 25 August 2010)

We experimentally demonstrate a high-Q ultrathin silicon nitride microring resonator operating at wavelength of 970 nm that is favorable for large variety of biophotonic applications. Implementation of thin device layer of 200 nm allows enhanced interaction between the optical mode and environment, while still maintaining high quality factor of resonator. In addition, we show the importance of spectral window around 970 nm to improve device sensing capability.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

bio-optics, optical resonators, Q-factor, silicon compounds

PACS

  • 87.50.wf

    Biophysical mechanisms of interaction

  • 42.79.-e

    Optical elements, devices, and systems

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3483766

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    K. C. Neuman and S. M. Block, Rev. Sci. Instrum. 75, 2787 (2004)RSINAK000075000009002787000001.


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