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Applied Physics Letters / Volume 97 / Issue 8 / PLASMAS AND ELECTRICAL DISCHARGES

Appl. Phys. Lett. 97, 081503 (2010); http://dx.doi.org/10.1063/1.3480409 (3 pages)

Effective design of multiple hollow cathode electrode to enhance the density of rf capacitively coupled plasma

H. S. Lee, Y. S. Lee, S. H. Seo, and H. Y. Chang

Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Republic of Korea

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(Received 6 April 2010; accepted 28 July 2010; published online 27 August 2010)

Multiple-hole electrode rf capacitively coupled plasma is experimentally studied to determine the optimum condition for high-density plasma discharge. The plasma density was measured at various pressures, hole diameters, rf currents, and gas species conditions. The bulk plasma intrusion in the hole and the ionization avalanche in the sheath region facilitated high-density plasma generation when the diameter of the hole is slightly wider than triple the sheath length. The analytic design of the efficient multihole electrode for high-density rf capacitively coupled plasma discharge will be discussed.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

glow discharges, ionisation, plasma density, plasma sheaths

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3480409

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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