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Applied Physics Letters / Volume 97 / Issue 9 / NANOSCALE SCIENCE AND DESIGN

Appl. Phys. Lett. 97, 093103 (2010); http://dx.doi.org/10.1063/1.3484277 (3 pages)

Nanodiamond-coated silicon cantilever array for chemical sensing

Rezal K. Ahmad, Ana Carolina Parada, Steve Hudziak, Aysha Chaudhary, and Richard B. Jackman

London Centre for Nanotechnology and Department of Electronic and Electrical Engineering, University College London, 17-19 Gordon Street, London WC1H 0AH, United Kingdom

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(Received 3 March 2010; accepted 4 August 2010; published online 31 August 2010)

Diamond offers attractive properties as a material for microelectromechanical chemical sensors but is difficult to process in comparison with silicon. Here a method for attaching detonation-derived nanodiamonds to prefabricated and mounted Si cantilever devices is described. It is shown that this hybrid device has a resonant frequency shifted down, compared to Si alone, by around 10% due to a higher spring constant. Exposure to 2,4-dinitrotoluene leads to an easily observed decrease in resonant frequency. The mechanisms behind these observations are discussed and the promise for this form of hybrid cantilever structure for chemical sensors applications highlighted.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

cantilevers, chemical sensors, diamond, elemental semiconductors, nanosensors, nanostructured materials, organic compounds, silicon

PACS

  • 07.10.Cm

    Micromechanical devices and systems

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 07.07.Df

    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3484277

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    G. Meyer and N. M. Am, Appl. Phys. Lett. 53, 1045 (1988)APPLAB000053000012001045000001.

    C. S. Smith, Phys. Rev. 94, 42 (1954).

    M. Bevilacqua, A. Chaudhary, and R. B. Jackman, J. Appl. Phys. 106, 123704 (2009)JAPIAU000106000012123704000001.


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