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Appl. Phys. Lett. 97, 093304 (2010); http://dx.doi.org/10.1063/1.3486225 (3 pages)

Electro-optic polymer infiltrated silicon photonic crystal slot waveguide modulator with 23 dB slow light enhancement

Che-Yun Lin1, Xiaolong Wang2, Swapnajit Chakravarty2, Beom Suk Lee1, Weicheng Lai1, Jingdong Luo3, Alex K.-Y. Jen3, and Ray T. Chen1

1Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, Texas 78712, USA
2Omega Optics Inc., Austin, Texas 78759, USA
3Department of Materials Science and Engineering, University of Washington, Seattle, Washington 98195, USA

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(Received 27 June 2010; accepted 15 August 2010; published online 3 September 2010)

A silicon/organic hybrid modulator integrating photonic crystal (PC) waveguide, 75 nm slot, and electro-optic (EO) polymer is experimentally demonstrated. Slow light in PC waveguide and strong field confinement in slot waveguide enable ultraefficient EO modulation with a record-low Vπ×L of 0.56 V mm and an in-device effective r33 of 132 pm/V. This result makes it the most efficient EO polymer modulator demonstrated to date. The modulated signal shows strong wavelength dependence and peak enhancement of 23 dB near the band edge of defect mode, which confirms the signature of the slow light effect.

© 2010 American Institute of Physics

KEYWORDS and PACS

PACS

  • 42.79.Hp

    Optical processors, correlators, and modulators

  • 42.70.Qs

    Photonic bandgap materials

  • 42.79.Gn

    Optical waveguides and couplers

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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Figures (click on thumbnails to view enlargements)

FIG.1
Schematic of the input strip waveguide, optical mode converter, PC taper, and modulation region.

FIG.1 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.2
(a) Enlarged portion of the dispersion diagram for the guided mode. (b) Group index (ng) and normalized in-slot optical power of the guided mode as a function of the optical wavelength. Optical mode profile at ng = 100 is shown in inset.

FIG.2 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.3
(a) Optical microscope picture of the fabricated MZM structure. (b) SEMs picture showing the enlarged view of the dotted square area in (a). (c) Cross-sectional SEM picture take across the dotted line in (b) after covering the entire structure in (a) with AJ-CKL1/APC. Complete infiltration of EO polymer into the 217 nm air holes and 75 nm slot is confirmed.

FIG.3 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.4
Low frequency modulation transfer-function measurement at 1564.5 nm wavelength: upper, applied voltage; lower, optical output signal. The half-wave voltage Vπ is determined by finding the difference between the applied voltage at which the optical output is at a maximum and the voltage at which the optical output is at the next minimum.

FIG.4 Download High Resolution Image (.zip file) | Export Figure to PowerPoint

FIG.5
Wavelength dependence of normalized modulated signal (blue) and normalized optical transmission (black). Four distinct regions are shown in this figure: normal group velocity region with high optical transmission and low modulated signal (blue); transitional region with gradually decreased optical transmission and rapidly increased modulated signal (light orange); slow light region with relatively low optical transmission but extremely high E-O modulation (orange); photonic band gap and beyond with minimized modulation (gray).

FIG.5 Download High Resolution Image (.zip file) | Export Figure to PowerPoint



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