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Applied Physics Letters / Volume 97 / Issue 9 / BIOPHYSICS AND BIO-INSPIRED SYSTEMS

Appl. Phys. Lett. 97, 093703 (2010); http://dx.doi.org/10.1063/1.3486112 (3 pages)

Piezoelectric-actuated, piezoresistive-sensed circular micromembranes for label-free biosensing applications

T. Alava1, F. Mathieu1, P. Rameil2, Y. Morel2, C. Soyer3, D. Remiens3, and L. Nicu1

1LAAS, CNRS, 7, Avenue du Colonel Roche, F-31077 Toulouse, France
2DGA Maitrise MNRBC, DGA/DT/CEB, 5 Rue Lavoisier, 91710 Vert le Petit, France
3University of Lille Nord de France, F-59000 Lille, France

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(Received 6 May 2010; accepted 13 July 2010; published online 2 September 2010)

In this paper, we report on the fabrication and characterization of the dynamic behavior of circular micromembranes integrating a piezoelectric thin film for actuation and a boron-doped silicon piezoresistor for sensing purposes. Resonant frequencies corresponding to high-order modes of vibration are measured, respectively, in air and deionized water. The measurements are compared with theoretical values calculated using the extended Lamb’s model [ H. Lamb, Proc. R. Soc. London 98, 205 (1920)] adapted to the microscale. Moreover, label-free detection of Bacillus atrophaeus (or B. atrophaeus) with a concentration of 108 spores/mL is repeatedly performed in real-time which assesses the biosensing potential of microscale circular membranes bearing actuation and sensing elements.

© 2010 American Institute of Physics

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KEYWORDS and PACS

Keywords

biosensors, elemental semiconductors, membranes, microfabrication, microorganisms, piezoelectric actuators, piezoelectric thin films, resistors, silicon

PACS

  • 87.80.-y

    Biophysical techniques (research methods)

  • 84.32.Ff

    Conductors, resistors (including thermistors, varistors, and photoresistors)

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 77.55.H-

    Piezoelectric and electrostrictive films

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3486112

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    S. R. Manalis, S. C. Minne, and C. F. Quate, Appl. Phys. Lett. 68, 871 (1996)APPLAB000068000006000871000001.

    W. C. Xu, S. Choi, and J. Chae, Appl. Phys. Lett. 96, 053703 (2010)APPLAB000096000005053703000001.

    H. Zhang, W. Pang, M. S. Marma, C. Y. Lee, S. Kamal-Bahl, E. S. Kim, and C. E. McKenna, Appl. Phys. Lett. 96, 123702 (2010)APPLAB000096000012123702000001.

    C. Ayela, L. Nicu, C. Soyer, E. Cattan, and C. Bergaud, J. Appl. Phys. 100, 054908 (2006)JAPIAU000100000005054908000001.

    T. Braun, V. Barwich, M. K. Ghatkesar, A. H. Bredekamp, C. Gerber, M. Hegner, and H. P. Lang, Phys. Rev. E 72, 031907 (2005).


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