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Applied Physics Letters / Volume 98 / Issue 12 / STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER

Appl. Phys. Lett. 98, 121901 (2011); http://dx.doi.org/10.1063/1.3567012 (3 pages)

Ultrasensitive string-based temperature sensors

T. Larsen1, S. Schmid1, L. Grönberg2, A. O. Niskanen3, J. Hassel2, S. Dohn1, and A. Boisen1

1Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345 East, DK-2800 Kongens Lyngby, Denmark
2VTT Technical Research Center of Finland, P.O. Box 1000, 02044 VTT, Finland
3Nokia Research Center, 21 JJ Thomson Avenue, CB3 0FA Cambridge, United Kingdom

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(Received 5 January 2011; accepted 15 February 2011; published online 21 March 2011)

Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured. The relative change in resonant frequency per temperature change of −1.74±0.04%/°C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.

© 2011 American Institute of Physics

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KEYWORDS and PACS

Keywords

temperature sensors

PACS

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3567012

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

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$abstract.society.value is a Member of CrossRef American Institute of Physics

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    P. Childs, J. Greenwood, and C. Long, Rev. Sci. Instrum. 71, 2959 (2000)RSINAK000071000008002959000001.

    S. Verbridge, H. Craighead, and J. Parpia, Appl. Phys. Lett. 92, 013112 (2008)APPLAB000092000001013112000001.

    A. Niskanen, J. Hassel, M. Tikander, P. Maijala, L. Gronberg, and P. Helisto, Appl. Phys. Lett. 95, 163102 (2009)APPLAB000095000016163102000001.

    Y. Okada and Y. Tokumaru, J. Appl. Phys. 56, 314 (1984)JAPIAU000056000002000314000001.

    A. Pandey, O. Gottlieb, O. Shtempluck, and E. Buks, Appl. Phys. Lett. 96, 203105 (2010)APPLAB000096000020203105000001.


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