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16 May 2011

Volume 98, Issue 20, Articles (20xxxx)

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Appl. Phys. Lett. 98, 201101 (2011); http://dx.doi.org/10.1063/1.3590716 (3 pages)

Martynas Beresna, Mindaugas Gecevičius, Peter G. Kazansky, and Titas Gertus
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Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source

S. Yuspeh, Y. Tao, R. A. Burdt, M. S. Tillack, Y. Ueno, and F. Najmabadi

Appl. Phys. Lett. 98, 201501 (2011); http://dx.doi.org/10.1063/1.3589359 (3 pages) | Cited 2 times

Online Publication Date: 18 May 2011

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The effect of laser focal spot diameters of 26 and 150 μm on 13.5 nm extreme ultraviolet (EUV) radiation is investigated. Simulations show that the smaller spot size has a shorter electron plasma density scale length and deeper and denser laser energy deposition region. This results in additional time required for plasma expansion and radiation transport to efficiently emit EUV light. This is experimentally observed as an increase in the delay between the EUV emission and the laser pulse. The shorter scale length plasma reabsorbs less EUV light, resulting in a higher conversion efficiency, smaller and slightly brighter light source.
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52.25.Os Emission, absorption, and scattering of electromagnetic radiation
52.50.Dg Plasma sources
52.25.Fi Transport properties
42.72.Bj Visible and ultraviolet sources
52.38.Kd Laser-plasma acceleration of electrons and ions
52.65.-y Plasma simulation
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