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17 Jan 2011

Volume 98, Issue 3, Articles (03xxxx)

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Appl. Phys. Lett. 98, 031101 (2011); http://dx.doi.org/10.1063/1.3529469 (3 pages)

Sinan Balci, Askin Kocabas, Coskun Kocabas, and Atilla Aydinli
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Making a geometrically asymmetric capacitive rf discharge electrically symmetric

Julian Schulze, Edmund Schüngel, Uwe Czarnetzki, Markus Gebhardt, Ralf Peter Brinkmann, and Thomas Mussenbrock

Appl. Phys. Lett. 98, 031501 (2011); http://dx.doi.org/10.1063/1.3544541 (3 pages) | Cited 3 times

Online Publication Date: 21 January 2011

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The electrical asymmetry effect in a spherical, geometrically asymmetric capacitive argon discharge driven by two consecutive harmonics is investigated using particle in cell simulations and analytical modeling. We find that the discharge asymmetry can be reduced electrically by tuning the phase shift between the driving frequencies, i.e., the absolute value of the dc self-bias voltage can be completely reduced and the mean ion energies at both electrodes can be adapted.
Show PACS
52.80.Pi High-frequency and RF discharges
52.65.Rr Particle-in-cell method
52.50.Dg Plasma sources
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