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Appl. Phys. Lett. 99, 213503 (2011); http://dx.doi.org/10.1063/1.3663865 (3 pages)

Non-resonant parametric amplification in biomimetic hair flow sensors: Selective gain and tunable filtering

H. Droogendijk, C. M. Bruinink, R. G. P. Sanders, and G. J. M. Krijnen

MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands

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(Received 14 September 2011; accepted 31 October 2011; published online 21 November 2011)

We demonstrate that the responsivity of flow sensors for harmonic flows can be improved significantly by non-resonant parametric amplification. Using electrostatic spring softening by AC-bias voltages, increased responsivity and sharp filtering are achieved in our biomimetic flow sensors. Tunable filtering is obtained for non-resonant electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies while achieving highly selective gain of up to 20 dB.

© 2011 American Institute of Physics

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KEYWORDS and PACS

PACS

  • 47.80.-v

    Instrumentation and measurement methods in fluid dynamics

  • 41.20.Cv

    Electrostatics; Poisson and Laplace equations, boundary-value problems

  • 87.90.+y

    Other topics in biological and medical physics (restricted to new topics in section 87)

  • 07.07.Df

    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

ARTICLE DATA

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

For access to fully linked references, you need to log in.
    D. Rugar and P. Grütter, Phys. Rev. Lett. 67, 699 (1991).

    D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 77, 1545 (2000)APPLAB000077000010001545000001.


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