Saturation effects in femtosecond laser ablation of silicon-on-insulator

Zhang, Hao; van Oosten, D.; Krol, D. M.; Dijkhuis, J. I.

doi:doi:10.1063/1.3666423

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Temperature stability of Bloch surface wave biosensors

We report on the experimental characterization of the thermal sensitivity of biosensors based on the coupling of Bloch surface waves (BSW) on amorphous silicon nitride/silicon one dimensional photonic crystals (1DPC). The results show that the silicon alloys compensate the thermo-optic effect taking place in the external medium and indicate that a class of temperature insensitive biosensors can be fabricated by properly designing the layout of the 1DPC. The experimental results are in very good...

Nonlinear-optical brain anatomy by harmonic-generation and coherent Raman microscopy on a compact femtosecond laser platform

An extended-cavity Cr:forsterite laser is integrated with a photonic-crystal fiber soliton frequency shifter and a periodically poled lithium niobate spectrum compressor for simultaneous harmonic-generation and coherent Raman brain imaging. Adapting the laser beam focusing geometry to the tissue morphology is shown to enable complementarity enhancement in tissue imaging by second- and third-harmonic generation, as well as coherent Raman scattering, facilitating quantitative image analysis.

We report a surface morphology study on single-shot submicron features fabricated on silicon on insulator by tightly focused femtosecond laser pulses. In the regime just below single-shot ablation threshold nano-tips are formed, whereas in the regime just above single-shot ablation threshold, a saturation in the ablation depth is found. We attribute this saturation by secondary laser absorption in the laser-induced plasma. In this regime, we find excellent agreement between the measured depths and a simple numerical model. When the laser fluence is further increased, a sharp increase in ablation depth is observed accompanied by a roughening of the ablated hole.

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KEYWORDS and PACS

Keywords

high-speed optical techniques, laser ablation, nanostructured materials, optical saturation, silicon-on-insulator, surface morphology

PACS

52.38.Mf

Laser ablation
78.47.J-

Ultrafast spectroscopy (<1 psec)
68.47.-b

Solid-gas/vacuum interfaces: types of surfaces

ARTICLE DATA

Digital Object Identifier

http://dx.doi.org/10.1063/1.3666423

PUBLICATION DATA

ISSN

0003-6951 (print)

1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef

American Institute of Physics

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