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Applied Physics Letters / Volume 99 / Issue 25 / NANOSCALE SCIENCE AND DESIGN

Appl. Phys. Lett. 99, 253103 (2011); http://dx.doi.org/10.1063/1.3671150 (3 pages)

Modal dependence of dissipation in silicon nitride drum resonators

V. P. Adiga1, B. Ilic2, R. A. Barton1, I. Wilson-Rae3, H. G. Craighead1, and J. M. Parpia4

1School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA
2Cornell Nanofabrication Facility, Cornell University, Ithaca, New York 14853, USA
3Physics Department, Technische Universität München, Garching, Germany
4Department of Physics, Cornell University, Ithaca, New York 14853, USA

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(Received 27 October 2011; accepted 29 November 2011; published online 20 December 2011)

We have fabricated large (≤400 μm diameter) high tensile stress SiN membrane mechanical resonators and measured the resonant frequency and quality factors (Q) of different modes of oscillation using optical interferometric detection. We observe that the dissipation (Q−1) is limited by clamping loss for pure radial modes, but higher order azimuthal modes are limited by a mechanism which appears to be intrinsic to the material. The observed dissipation is strongly dependent on size of the membrane and mode type. Appropriate choice of size and operating mode allows the selection of optimum resonator designs for applications in mass sensing and optomechanical experiments.

© 2011 American Institute of Physics

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KEYWORDS and PACS

Keywords

light interferometry, micromechanical resonators, nanoelectromechanical devices, nanofabrication, Q-factor, silicon compounds

PACS

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3671150

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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    I. Wilson-Rae, Phys. Rev. B 77, 245418 (2008).

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    A. Jöckel, M. T. Rakher, M. Korppi, S. Camerer, D. Hunger, M. Mader, and P. Treutlein, Appl. Phys. Lett. 99, 143109 (2011)APPLAB000099000014143109000001.


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