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Applied Physics Letters / Volume 99 / Issue 8 / NANOSCALE SCIENCE AND DESIGN

Appl. Phys. Lett. 99, 083105 (2011); http://dx.doi.org/10.1063/1.3629551 (3 pages)

Ultra-wide bandwidth piezoelectric energy harvesting

Arman Hajati1 and Sang-Gook Kim2

1Department of EECS, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
2Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA

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(Received 3 January 2011; accepted 4 August 2011; published online 23 August 2011)

Here, we present an ultra wide-bandwidth energy harvester by exploiting the nonlinear stiffness of a doubly clamped microelectromechanical systems (MEMSs) resonator. The stretching strain in a doubly clamped beam shows a nonlinear stiffness, which provides a passive feedback and results in amplitude-stiffened Duffing mode resonance. This design has been fabricated into a compact MEMS device, which is about the size of a US quarter coin. Based on the open circuit voltage measurement, it is expected to have more than one order of magnitude improvement in both bandwidth (more than 20% of the peak frequency) and power density (up to 2 W/cm3) in comparison to the devices previously reported.

© 2011 American Institute of Physics

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KEYWORDS and PACS

Keywords

energy harvesting, feedback, microfabrication, micromechanical resonators, piezoelectric devices

PACS

  • 84.60.-h

    Direct energy conversion and storage

  • 85.50.-n

    Dielectric, ferroelectric, and piezoelectric devices

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 81.16.-c

    Methods of micro- and nanofabrication and processing

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3629551

PUBLICATION DATA

ISSN

0003-6951 (print)  
1077-3118 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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    References

    B. Marinkovic and H. Koser, Appl. Phys. Lett. 94, 103505 (2009)APPLAB000094000010103505000001.


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